System Concept
System Features
Executes automatically Particle Check and Cleaning(PN2)
Easy System that Check&Cleaning recipe management/control is available by PC control
Realizes Particle Check by Vision System
Reticle Cleaner
Features
Maximize productivity increase and minimize reticle repair cost by implementation of reticle break prevention, inspection and cleaning at once in produce line
Applications
Manual Type Reticle : ASML, Nikon (1 Reticle / 1 Carrier)
Auto Type Reticle : ASML (1 ~ 6 Reticle / Carrier), Nikon
Specification
Manual Type
| ITEM | SPEC | REMARKS |
|---|---|---|
| MODE | Auto & Manual | Matches ASML, Nikon Type |
| VISION INSPECTION | TOP & Bottom | Exclusive optical system |
| PARTICLE SIZE | 〉30um | Optional(Changeable) |
| PARTICLE CLEANING | Auto & Manual | Recipe Management |
| CLEANING SOURCE | PN2 | Adapter filter |
| CLEANING SIDE | Top | |
| CLEANING OPERATION | Step Motor | |
| CONTROLLER | PC Base | |
| UTIRITY | PN2, Air, VAC, EXH | |
| POWER | AC220V(Single) | |
| CARRIER TYPE | 1 ~ 6 Reticle / Carrier | Matches 1 pod |
Auto Type
| ITEM | SPEC | REMARKS |
|---|---|---|
| MODE | Manual | ASML, Nikon Type |
| CARRIER TYPE | 1Reticle / 1Carrier | |
| PARTICLE CLEANING | Manual | |
| CLEANING SOURCE | PN2 | Adapter filter |
| CLEANING SIDE | Top side | |
| CLEANING OPERATION | Manual | |
| CONTROLLER | Manual switch | |
| UTIRITY | PN2, Air, VAC, EXH | |
| POWER | AC220V(Single) |