Features
Prevention of process defect due to abnormal coating(causes leak, empty)
of track process HMDS
Minimize actual coating flow rate deviation by two temperature deviation
method sensor between same process module and unit
Comparative valution
Comparative valuation of flow rate difference between sensor1 and sensor2 by utilizing the different temperature transmission capabilities of each gas
Sensor
ITEM | SPEC | MEASURE |
---|---|---|
FLOW RATE | 5.25 | Slm |
WORKING PRESSURE | 1 | Barg |
PRESSURE RANGE | 0.5~3 | Barg |
RESPONSE TIME | <=1 | Sec |
OUTPUT SIGNAL | RS-485 | |
POWER | 15~24 | DCV |
SEAL MATERIAL | Kalrez | |
BODY MATERIAL | SUS 316 | |
MAXIMUM TEMPERATURE | 75 | ℃ |
Controller
ITEM | SPEC |
---|---|
POWER | 220ACV |
SCREEN | 7″Touch |
OS | Windows7 |
VACCINE | V3 Lite |
COMMUNICATION METHOD | RS-485 |
HOST COMMUNICATION | Ethernet |
PROTOCOL | Rendezvous, SECS |
AVAILABLE SENSOR | 24 |
AVAILABLE UNIT | 8 |